Can silicon carbide ceramic parts be used in the semiconductor industry?
Yes, black silicon carbide ceramic parts!
Semiconductor manufacturing is the cornerstone of the development of modern science and technology, with the industry’s continuous pursuit of smaller, faster, more efficient integrated circuits, the precision and technical complexity of the manufacturing process is also increasing, every step is inseparable from high-performance, high-quality and high-precision semiconductor equipment. As a structural ceramic material with excellent performance, black silicon carbide (SiC) has the characteristics of high density, high thermal conductivity, high bending strength, high elastic modulus, strong corrosion resistance, high temperature resistance, etc. It is not easy to produce bending stress deformation and thermal strain, and can adapt to the strong corrosion and ultra-high temperature reaction environment of wafer epitaxy, etching and other manufacturing links. Therefore, it has been widely used in semiconductor manufacturing processes such as grinding and polishing, epitaxial/oxidation/diffusion heat treatment, lithography, deposition, etching, and ion implantation.
Description for black SIC:
It is produced by smelting quartz sand, petroleum coke (or coal coke), wood chips, and other raw materials in a resistance furnace. It appears as a black opaque body with hexagonal crystals and a Mohs hardness of 9.15. Second only to diamond and boron carbide, it possesses brittle and sharp properties with a certain degree of conductivity.
Typical Physical Properties:
| Mohs Hardness | 9.15 |
| Melting Point | 2250℃ |
| Maximum Use Temperature | 1900℃ |
| True Density | 3.2-3.4g/cm3 |
| Knoop Hardness | 2840-3320kg/mm2 |
Grit Size & Chemical Analysis:
| Grits Size | F 8# 10# 12# 14# 16# 20# 24# 30# 36# 40# 46# 54# 60# 70# 80# 90# 100# 120# 150# 180# 220#mesh | |
| Chemical Composition (%) | SIC | ≥98.5 |
| F.C | ≤0.2 | |
| Fe2O3 | ≤0.2 | |
| H2O3 | ≤1 | |
Black silicon carbide F120#:
Package for black carborundum:
- 25KG Small bags
- Small bags + pallet
